%0 Conference Paper %1 conf/icarcv/HoTZYH04 %A Ho, Weng Khuen %A Tay, Arthur %A Zhou, Ying %A Yang, Kai %A Hu, Ni %B ICARCV %D 2004 %I IEEE %K dblp %P 485-490 %T Detection of wafer warpages during thermal processing in microlithography. %U http://dblp.uni-trier.de/db/conf/icarcv/icarcv2004.html#HoTZYH04 %@ 0-7803-8653-1

@inproceedings{conf/icarcv/HoTZYH04, added-at = {2017-05-23T00:00:00.000+0200}, author = {Ho, Weng Khuen and Tay, Arthur and Zhou, Ying and Yang, Kai and Hu, Ni}, biburl = {https://www.bibsonomy.org/bibtex/2439fa31d4b0c0c61818eecf8cd8453d2/dblp}, booktitle = {ICARCV}, crossref = {conf/icarcv/2004}, ee = {https://doi.org/10.1109/ICARCV.2004.1468873}, interhash = {434c4c4b4f2a6f9108905689c941b180}, intrahash = {439fa31d4b0c0c61818eecf8cd8453d2}, isbn = {0-7803-8653-1}, keywords = {dblp}, pages = {485-490}, publisher = {IEEE}, timestamp = {2019-10-17T17:38:23.000+0200}, title = {Detection of wafer warpages during thermal processing in microlithography.}, url = {http://dblp.uni-trier.de/db/conf/icarcv/icarcv2004.html#HoTZYH04}, year = 2004 }