%0 Journal Article %1 journals/mr/SchramRLDCTHLHV05 %A Schram, Tom %A Ragnarsson, L.-Å. %A Lujan, G. S. %A Deweerd, W. %A Chen, J. %A Tsai, W. %A Henson, K. %A Lander, R. J. P. %A Hooker, J. C. %A Vertommen, J. %D 2005 %J Microelectron. Reliab. %K dblp %N 5-6 %P 779-782 %T Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors. %U http://dblp.uni-trier.de/db/journals/mr/mr45.html#SchramRLDCTHLHV05 %V 45

@article{journals/mr/SchramRLDCTHLHV05, added-at = {2020-02-22T00:00:00.000+0100}, author = {Schram, Tom and Ragnarsson, L.-Å. and Lujan, G. S. and Deweerd, W. and Chen, J. and Tsai, W. and Henson, K. and Lander, R. J. P. and Hooker, J. C. and Vertommen, J.}, biburl = {https://www.bibsonomy.org/bibtex/245043f111b4855553547d9d46513b7a6/dblp}, ee = {https://doi.org/10.1016/j.microrel.2004.11.050}, interhash = {4359f5a3462a7d5ad85daf304a28f6da}, intrahash = {45043f111b4855553547d9d46513b7a6}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {5-6}, pages = {779-782}, timestamp = {2020-02-25T13:24:09.000+0100}, title = {Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr45.html#SchramRLDCTHLHV05}, volume = 45, year = 2005 }