%0 Conference Paper %1 conf/apccas/Kohira0MKNT16 %A Kohira, Yukihide %A Takahashi, Atsushi %A Matsui, Tomomi %A Kodama, Chikaaki %A Nojima, Shigeki %A Tanaka, Satoshi %B APCCAS %D 2016 %I IEEE %K dblp %P 538-541 %T Manufacturability-aware mask assignment in multiple patterning lithography. %U http://dblp.uni-trier.de/db/conf/apccas/apccas2016.html#Kohira0MKNT16 %@ 978-1-5090-1570-2

@inproceedings{conf/apccas/Kohira0MKNT16, added-at = {2023-03-21T00:00:00.000+0100}, author = {Kohira, Yukihide and Takahashi, Atsushi and Matsui, Tomomi and Kodama, Chikaaki and Nojima, Shigeki and Tanaka, Satoshi}, biburl = {https://www.bibsonomy.org/bibtex/2ac09c839c73e7f0de7ea6e77b44c7d97/dblp}, booktitle = {APCCAS}, crossref = {conf/apccas/2016}, ee = {https://doi.org/10.1109/APCCAS.2016.7804023}, interhash = {492bab5959408a5f2eb2fafa3cc4dbbb}, intrahash = {ac09c839c73e7f0de7ea6e77b44c7d97}, isbn = {978-1-5090-1570-2}, keywords = {dblp}, pages = {538-541}, publisher = {IEEE}, timestamp = {2024-04-10T05:03:47.000+0200}, title = {Manufacturability-aware mask assignment in multiple patterning lithography.}, url = {http://dblp.uni-trier.de/db/conf/apccas/apccas2016.html#Kohira0MKNT16}, year = 2016 }