%0 Conference Paper %1 conf/vlsit/IshiharaSOSMYMU23 %A Ishihara, N. %A Shimada, Y. %A Ochi, T. %A Seto, S. %A Matsuo, H. %A Yamashita, H. %A Morita, S. %A Ukishima, M. %A Uejima, K. %A Arayashiki, Y. %A Kajiwara, S. %A Murayama, A. %A Nishiyama, K. %A Sugimae, K. %A Mori, S. %A Saito, Y. %A Shundo, T. %A Maeda, A. %A Kamiya, H. %A Uchiyama, Y. %A Fujiwara, M. %A Aiso, F. %A Sekine, K. %A Ohtani, N. %B VLSI Technology and Circuits %D 2023 %I IEEE %K dblp %P 1-2 %T Highly Scalable Metal Induced Lateral Crystallization (MILC) Techniques for Vertical Si Channel in Ultra-High (> 300 Layers) 3D Flash Memory. %U http://dblp.uni-trier.de/db/conf/vlsit/vlsit2023.html#IshiharaSOSMYMU23 %@ 978-4-86348-806-9

@inproceedings{conf/vlsit/IshiharaSOSMYMU23, added-at = {2023-07-28T00:00:00.000+0200}, author = {Ishihara, N. and Shimada, Y. and Ochi, T. and Seto, S. and Matsuo, H. and Yamashita, H. and Morita, S. and Ukishima, M. and Uejima, K. and Arayashiki, Y. and Kajiwara, S. and Murayama, A. and Nishiyama, K. and Sugimae, K. and Mori, S. and Saito, Y. and Shundo, T. and Maeda, A. and Kamiya, H. and Uchiyama, Y. and Fujiwara, M. and Aiso, F. and Sekine, K. and Ohtani, N.}, biburl = {https://www.bibsonomy.org/bibtex/2a185fba56a00aa6e96b42e73ce83a37a/dblp}, booktitle = {VLSI Technology and Circuits}, crossref = {conf/vlsit/2023}, ee = {https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185401}, interhash = {70be55dbe80359cf0eb2a079d8dbb9e0}, intrahash = {a185fba56a00aa6e96b42e73ce83a37a}, isbn = {978-4-86348-806-9}, keywords = {dblp}, pages = {1-2}, publisher = {IEEE}, timestamp = {2024-04-09T19:13:01.000+0200}, title = {Highly Scalable Metal Induced Lateral Crystallization (MILC) Techniques for Vertical Si Channel in Ultra-High (> 300 Layers) 3D Flash Memory.}, url = {http://dblp.uni-trier.de/db/conf/vlsit/vlsit2023.html#IshiharaSOSMYMU23}, year = 2023 }