%0 Journal Article %1 citeulike:10123837 %A Todd, Shane T. %A Xie, Huikai %D 2008 %I IEEE %J Journal of Microelectromechanical Systems %K lumped-parameter-modelling 00a71-theory-of-mathematical-modeling 74f05-solid-mechanics-thermal-effects 78a55-optics-electromagnetic-theory-technical-applications %N 1 %P 213--225 %R 10.1109/jmems.2007.908754 %T An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator %U http://dx.doi.org/10.1109/jmems.2007.908754 %V 17 %X This paper reports a simple electrothermomechanical lumped element model (ETM-LEM) that describes the behavior of an electrothermal bimorph actuator. The ETM-LEM is developed by integrating an electrothermal LEM of a heater with a thermomechanical LEM of a bimorph actuator. This new LEM uses only one power source in both the electrical and thermal domains. The LEM provides a simple and accurate way of relating the output mechanical response of a bimorph actuator to the electrical inputs. The model shows that the tip angular rotation of the bimorph actuator is linearly proportional to its average temperature change. The LEM predicts a linear relationship between both the average temperature change and bimorph tip angular rotation versus voltage when operated above a certain voltage. The LEM is used to predict the rotation angle of a fabricated electrothermal bimorph micromirror in response to the electrical inputs and produces results that agree with finite element model simulations and experimental data within 15\% for all measured parameters.

@article{citeulike:10123837, abstract = {{This paper reports a simple electrothermomechanical lumped element model (ETM-LEM) that describes the behavior of an electrothermal bimorph actuator. The ETM-LEM is developed by integrating an electrothermal LEM of a heater with a thermomechanical LEM of a bimorph actuator. This new LEM uses only one power source in both the electrical and thermal domains. The LEM provides a simple and accurate way of relating the output mechanical response of a bimorph actuator to the electrical inputs. The model shows that the tip angular rotation of the bimorph actuator is linearly proportional to its average temperature change. The LEM predicts a linear relationship between both the average temperature change and bimorph tip angular rotation versus voltage when operated above a certain voltage. The LEM is used to predict the rotation angle of a fabricated electrothermal bimorph micromirror in response to the electrical inputs and produces results that agree with finite element model simulations and experimental data within 15\% for all measured parameters.}}, added-at = {2017-06-29T07:13:07.000+0200}, author = {Todd, Shane T. and Xie, Huikai}, biburl = {https://www.bibsonomy.org/bibtex/2e477029265d6acc44c1196fc1c8e9048/gdmcbain}, citeulike-article-id = {10123837}, citeulike-attachment-1 = {Todd__Xie_2008_-_An_electrothermomechanical_lumped_element_model_of_an_electrothermal_bimorph_actuator.pdf; /pdf/user/gdmcbain/article/10123837/729215/Todd__Xie_2008_-_An_electrothermomechanical_lumped_element_model_of_an_electrothermal_bimorph_actuator.pdf; 253c9afe6b178e7914a1f07a09e97a0ab62f1321}, citeulike-linkout-0 = {http://dx.doi.org/10.1109/jmems.2007.908754}, citeulike-linkout-1 = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=4400847}, comment = {(private-note)recirculated by sam 2016-06-30}, doi = {10.1109/jmems.2007.908754}, file = {Todd__Xie_2008_-_An_electrothermomechanical_lumped_element_model_of_an_electrothermal_bimorph_actuator.pdf}, institution = {Florida Univ., Gainesville}, interhash = {7159d52808c38c34f62fe2a2755bc36b}, intrahash = {e477029265d6acc44c1196fc1c8e9048}, issn = {1057-7157}, journal = {Journal of Microelectromechanical Systems}, keywords = {lumped-parameter-modelling 00a71-theory-of-mathematical-modeling 74f05-solid-mechanics-thermal-effects 78a55-optics-electromagnetic-theory-technical-applications}, month = feb, number = 1, pages = {213--225}, posted-at = {2011-12-13 00:34:07}, priority = {2}, publisher = {IEEE}, timestamp = {2019-07-02T02:17:41.000+0200}, title = {{An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator}}, url = {http://dx.doi.org/10.1109/jmems.2007.908754}, volume = 17, year = 2008 }