Abstract
A process of producing relatively large, dense, free-standing silicon
carbide articles by chemical vapor deposition is enabled by the
provision of specially designed isolation devices. These devices
segregate silicon carbide deposits on the intended portions of substrates,
thereby alleviating the need to fracture heavy silicon carbide deposits
in order to remove, or otherwise move, the substrate, with the heavy
deposit thereon, from the deposition furnace. The isolation devices
enable the use of more efficient vertically extended vacuum furnaces.
The isolation devices also enable the commercial production of relatively
dense, large, thin-walled, silicon carbide shells
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