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%0 Conference Paper
%1 conf/3dic/BeaMONKLFTK09
%A Bea, Ji Chel
%A Murugesan, Mariappan
%A Ohara, Yuki
%A Noriki, Akihiro
%A Kino, Hisashi
%A Lee, Kang Wook
%A Fukushima, Takafumi
%A Tanaka, Tetsu
%A Koyanagi, Mitsumasa
%B 3DIC
%D 2009
%I IEEE
%K dblp
%P 1-5
%T Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration.
%U http://dblp.uni-trier.de/db/conf/3dic/3dic2009.html#BeaMONKLFTK09
%@ 978-1-4244-4512-7
@inproceedings{conf/3dic/BeaMONKLFTK09,
added-at = {2023-09-30T00:00:00.000+0200},
author = {Bea, Ji Chel and Murugesan, Mariappan and Ohara, Yuki and Noriki, Akihiro and Kino, Hisashi and Lee, Kang Wook and Fukushima, Takafumi and Tanaka, Tetsu and Koyanagi, Mitsumasa},
biburl = {https://www.bibsonomy.org/bibtex/26982d77362ee785bac4c87f82fccfb5e/dblp},
booktitle = {3DIC},
crossref = {conf/3dic/2009},
ee = {https://doi.org/10.1109/3DIC.2009.5306568},
interhash = {823d6574c99e985fa0626cac06986c07},
intrahash = {6982d77362ee785bac4c87f82fccfb5e},
isbn = {978-1-4244-4512-7},
keywords = {dblp},
pages = {1-5},
publisher = {IEEE},
timestamp = {2024-04-10T12:10:49.000+0200},
title = {Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration.},
url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2009.html#BeaMONKLFTK09},
year = 2009
}