%0 Conference Paper %1 conf/nems/LiZWLWC17 %A Li, Wei %A Zhou, Xiaofeng %A Wu, Jian %A Lin, Youling %A Wang, Ze %A feng Che, Lu %B NEMS %D 2017 %I IEEE %K %P 194-197 %T A MEMS accelerometer with double-sided symmetrical folded-beams on single wafer. %U http://dblp.uni-trier.de/db/conf/nems/nems2017.html#LiZWLWC17 %@ 978-1-5090-3059-0

@inproceedings{conf/nems/LiZWLWC17, added-at = {2023-12-13T02:44:13.000+0100}, author = {Li, Wei and Zhou, Xiaofeng and Wu, Jian and Lin, Youling and Wang, Ze and feng Che, Lu}, biburl = {https://www.bibsonomy.org/bibtex/29c8ab2855aa6d168e0e80959371f6857/admin}, booktitle = {NEMS}, crossref = {conf/nems/2017}, ee = {https://doi.org/10.1109/NEMS.2017.8017004}, interhash = {82ea6191cfc9f4207dcfe6b43502b233}, intrahash = {9c8ab2855aa6d168e0e80959371f6857}, isbn = {978-1-5090-3059-0}, keywords = {}, pages = {194-197}, publisher = {IEEE}, timestamp = {2023-12-13T02:44:13.000+0100}, title = {A MEMS accelerometer with double-sided symmetrical folded-beams on single wafer.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2017.html#LiZWLWC17}, year = 2017 }