@article{journals/sensors/LiuHWZXSTYGXRR19,
added-at = {2022-10-02T00:00:00.000+0200},
author = {Liu, Wenjuan and He, Leming and Wang, Xubo and Zhou, Jia and Xu, Weijiang and Smagin, Nikolay and Toubal, Malika and Yu, Hao and Gu, Yuandong and Xu, Jinghui and Remiens, Denis and Ren, Junyan},
biburl = {https://www.bibsonomy.org/bibtex/2d7d830c9b4116b1cb03c834471186bfd/dblp},
ee = {https://www.wikidata.org/entity/Q90724797},
interhash = {8b2e2321ec76b0f3f9c53e45c2aa2549},
intrahash = {d7d830c9b4116b1cb03c834471186bfd},
journal = {Sensors},
keywords = {dblp},
number = 20,
pages = 4450,
timestamp = {2024-04-09T04:17:00.000+0200},
title = {3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI.},
url = {http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#LiuHWZXSTYGXRR19},
volume = 19,
year = 2019
}