%0 Generic %1 Microcavity %A A.S.Kurhekar, %D 2010 %E BIOINFO2010, %K anisotropic depth etch etching microcavity %T Etch-Depth Measurement of Anisotropically Etched Trapezoidal Micro-cavity

@conference{Microcavity, added-at = {2012-02-17T17:48:55.000+0100}, author = {A.S.Kurhekar}, biburl = {https://www.bibsonomy.org/bibtex/230906db9af224d923d672803f4478269/askurhekar}, editor = {BIOINFO2010}, interhash = {be8d0647caf55adc3429a2196c5ea8fa}, intrahash = {30906db9af224d923d672803f4478269}, keywords = {anisotropic depth etch etching microcavity}, timestamp = {2012-02-17T17:48:55.000+0100}, title = {Etch-Depth Measurement of Anisotropically Etched Trapezoidal Micro-cavity}, year = 2010 }