%0 Journal Article %1 journals/sensors/CuiLCZW11 %A Cui, Feng %A Liu, Wu %A Chen, Wenyuan %A Zhang, Weiping %A Wu, Xiaosheng %D 2011 %J Sensors %K dblp %N 12 %P 11206-11234 %T Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer. %U http://dblp.uni-trier.de/db/journals/sensors/sensors11.html#CuiLCZW11 %V 11

@article{journals/sensors/CuiLCZW11, added-at = {2023-09-30T00:00:00.000+0200}, author = {Cui, Feng and Liu, Wu and Chen, Wenyuan and Zhang, Weiping and Wu, Xiaosheng}, biburl = {https://www.bibsonomy.org/bibtex/219cc454df2a5e4e25c0ccd6e1bafa614/dblp}, ee = {https://www.wikidata.org/entity/Q35654396}, interhash = {c8e8f2e8b2d7fda469bd2638c52a60d5}, intrahash = {19cc454df2a5e4e25c0ccd6e1bafa614}, journal = {Sensors}, keywords = {dblp}, number = 12, pages = {11206-11234}, timestamp = {2024-04-09T04:25:17.000+0200}, title = {Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer.}, url = {http://dblp.uni-trier.de/db/journals/sensors/sensors11.html#CuiLCZW11}, volume = 11, year = 2011 }