%0 Generic %1 Berenbaum2000 %A Berenbaum, D. %A Duke, D. A. %A Hauf, H. %A Petri, R. %A Favreau, J-C. %D 2000 %K CVD Tunsten %N 6066366 %T Method for depositing uniform tungsten layers by CVD %U http://www.freepatentsonline.com/6066366.html

@patent{Berenbaum2000, added-at = {2009-11-05T12:01:24.000+0100}, author = {Berenbaum, D. and Duke, D. A. and Hauf, H. and Petri, R. and Favreau, J-C.}, bibtexkey = {Berenbaum2000}, biburl = {https://www.bibsonomy.org/bibtex/256bbc9dddba83328cff03d67c0aa1938/ghuot}, file = {Berenbaum2000.pdf:W\\Brevet\\Berenbaum2000.pdf:PDF}, interhash = {d098b868e2797ae06423a0d292486c76}, intrahash = {56bbc9dddba83328cff03d67c0aa1938}, keywords = {CVD Tunsten}, month = May, number = 6066366, timestamp = {2009-11-05T12:01:25.000+0100}, title = {Method for depositing uniform tungsten layers by CVD}, url = {http://www.freepatentsonline.com/6066366.html}, year = 2000 }