Abstract
One of the barriers to full commercialization of
complicated MEMS devices is reliableness. Stiction may be a
major obstacle within the reliableness of MEMS electrical
phenomenon
switches.
Stiction
failures
in
microelectromechanical systems (MEMS) occur once
suspended elastic members are unexpectedly falls right down
to their substrates or once surface forces overcome the
mechanical restoring force of a micro-structure. This paper
presents the novel comb drive kind of switch. The planned
switch is free from microwelding and stiction problem;
successively it provides the high reliableness and long period
of time. Upon application of a bias voltage, the comb drive
maximizes their capacitance by increasing the overlap space
between them. The switch is on and off depends on comb drive
propulsion principal by the modification of capacitance
between the ground line and signal lines. The proposed
structure gives very low insertion loss and high isolation.
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