%0 Thesis %1 prange2000abscheidung %A Prange, Robert %D 2000 %K %T Abscheidung metastabiler Ti_1tn1_1tn-_1tnxAl_1tnxN-Schichten nach dem plasmagestützten CVD-Verfahren

@phdthesis{prange2000abscheidung, added-at = {2023-12-14T16:08:37.000+0100}, author = {Prange, Robert}, biburl = {https://www.bibsonomy.org/bibtex/27e8ea786f6c65cfbe855d5752613b063/admin}, dnbtitleid = {95850847X}, interhash = {f41d6a110329219b8a794f3645d6dc74}, intrahash = {7e8ea786f6c65cfbe855d5752613b063}, keywords = {}, school = {TU Aachen}, timestamp = {2023-12-14T16:08:37.000+0100}, title = {Abscheidung metastabiler Ti_1tn1_1tn-_1tnxAl_1tnxN-Schichten nach dem plasmagestützten CVD-Verfahren}, year = 2000 }