%0 Conference Paper %1 conf/essderc/DeheWFK13 %A Dehe, Alfons %A Wurzer, Martin %A Fuldner, Marc %A Krumbein, Ulrich %B ESSDERC %D 2013 %I IEEE %K dblp %P 292-295 %T Design of a poly silicon MEMS microphone for high signal-to-noise ratio. %U http://dblp.uni-trier.de/db/conf/essderc/essderc2013.html#DeheWFK13

@inproceedings{conf/essderc/DeheWFK13, added-at = {2017-05-19T00:00:00.000+0200}, author = {Dehe, Alfons and Wurzer, Martin and Fuldner, Marc and Krumbein, Ulrich}, biburl = {https://www.bibsonomy.org/bibtex/2ba175c36f97af2d16bc5876dbe429fdf/dblp}, booktitle = {ESSDERC}, crossref = {conf/essderc/2013}, ee = {https://doi.org/10.1109/ESSDERC.2013.6818876}, interhash = {f583866ebde8c7ea8f43f0dda7a779ea}, intrahash = {ba175c36f97af2d16bc5876dbe429fdf}, keywords = {dblp}, pages = {292-295}, publisher = {IEEE}, timestamp = {2019-10-17T12:39:38.000+0200}, title = {Design of a poly silicon MEMS microphone for high signal-to-noise ratio.}, url = {http://dblp.uni-trier.de/db/conf/essderc/essderc2013.html#DeheWFK13}, year = 2013 }