%0 Conference Paper %1 conf/irps/VaisHSYAMKKWSC21 %A Vais, Abhitosh %A Hsu, Brent %A Syshchyk, Olga %A Yu, Hao %A Alian, AliReza %A Mols, Yves %A Kodandarama, Komal Vondkar %A Kunert, Bernardette %A Waldron, Niamh %A Simoen, Eddy %A Collaert, Nadine %B IRPS %D 2021 %I IEEE %K dblp %P 1-5 %T A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies. %U http://dblp.uni-trier.de/db/conf/irps/irps2021.html#VaisHSYAMKKWSC21 %@ 978-1-7281-6893-7

@inproceedings{conf/irps/VaisHSYAMKKWSC21, added-at = {2023-09-30T00:00:00.000+0200}, author = {Vais, Abhitosh and Hsu, Brent and Syshchyk, Olga and Yu, Hao and Alian, AliReza and Mols, Yves and Kodandarama, Komal Vondkar and Kunert, Bernardette and Waldron, Niamh and Simoen, Eddy and Collaert, Nadine}, biburl = {https://www.bibsonomy.org/bibtex/2c6f9307e77005a8d2ce2828d6c16691a/dblp}, booktitle = {IRPS}, crossref = {conf/irps/2021}, ee = {https://doi.org/10.1109/IRPS46558.2021.9405095}, interhash = {fb309d97544b60964280d6591a26d1f0}, intrahash = {c6f9307e77005a8d2ce2828d6c16691a}, isbn = {978-1-7281-6893-7}, keywords = {dblp}, pages = {1-5}, publisher = {IEEE}, timestamp = {2024-04-09T12:18:55.000+0200}, title = {A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies.}, url = {http://dblp.uni-trier.de/db/conf/irps/irps2021.html#VaisHSYAMKKWSC21}, year = 2021 }