%0 Thesis %1 schumacher2000untersuchungen %A Schumacher, Alain %D 2000 %K %T Untersuchungen zur Synthese von c-BN-Schichten mit ECWR-PACVD und Boran-Ammonia als Eduktmaterial

@phdthesis{schumacher2000untersuchungen, added-at = {2023-12-14T16:43:31.000+0100}, author = {Schumacher, Alain}, biburl = {https://www.bibsonomy.org/bibtex/2322cdcc976cb7279f1b37ebb8f35089d/admin}, dnbtitleid = {962307092}, interhash = {fc4222302fc866b906ddf4ff99aa01e2}, intrahash = {322cdcc976cb7279f1b37ebb8f35089d}, keywords = {}, school = {Uni Kaiserslautern}, timestamp = {2023-12-14T16:43:31.000+0100}, title = {Untersuchungen zur Synthese von c-BN-Schichten mit ECWR-PACVD und Boran-Ammonia als Eduktmaterial}, year = 2000 }