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A novel method for deadlock prevention of AMS by using resource-oriented Petri nets., , и . Inf. Sci., (2016)Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry., , , и . ICNSC, стр. 1-6. IEEE, (2016)Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets., и . OR Spectrum, 29 (3): 421-443 (2007)Petri net-based real-time scheduling of time-constrained single-arm cluster tools with activity time variation., , и . ICRA, стр. 5056-5061. IEEE, (2012)Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net., и . CASE, стр. 87-92. IEEE, (2006)Petri net-based scheduling of time-constrained dual-arm cluster tools with bounded activity time variation., и . CASE, стр. 465-470. IEEE, (2010)Linear programming-based approach to scheduling of crude oil operations in refinery with oil type mixing requirement., , и . CASE, стр. 430-435. IEEE, (2014)Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting., , и . CASE, стр. 90-95. IEEE, (2011)Resource-Oriented Petri Net-Based Approach to Deadlock Prevention of AMSs., , и . SMC, стр. 515-520. IEEE, (2015)Resource selection for distributed manufacturing in agile manufacturing., , и . SMC, стр. 1578-1582. IEEE, (2003)