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Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction.

, , , , , , и . Int. J. Autom. Technol., 16 (5): 572-581 (2022)

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Ryo Sugihara

Ryo Kohsaka

Makoto Sato

Jong Won Ryoo

Nobuko Sato

 

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