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Fabrication and characterization of fine pitch TSV integration with self-aligned backside insulation layer opening., , , , и . NEMS, стр. 91-94. IEEE, (2016)A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application., , , , , , , , и . NEMS, стр. 304-307. IEEE, (2018)The impact of respiratory motion and CT pitch on the robustness of radiomics feature extraction in 4DCT lung imaging., , , , , , , , , и . Comput. Methods Programs Biomed., (2020)Electrical characterization of integrated passive devices using thin film technology for 3D integration., , , , , , , и . Journal of Zhejiang University - Science C, 14 (4): 235-243 (2013)Effect of Shared Cavity on Electromechanical Performance of Piezoelectric Based Micro-machined Ultrasonic Transducer Array., , , , , , , и . NEMS, стр. 482-487. IEEE, (2019)Thermal Effect of PMUT and Its Application to the Heat Dissipation of Power Electronics., , , , , , , , и . NEMS, стр. 540-544. IEEE, (2019)Fabrication and characterization of ultra-thin PIN detector., , , , , и . NEMS, стр. 513-517. IEEE, (2010)Fabrication Process and Performance Analysis of AlN based Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Structure., , , , , , , , и . NEMS, стр. 514-519. IEEE, (2019)Clinical Effect of Intelligent Temperature Control System in Preventing Skin Burns Caused by Tumor Hyperthermia., , , , , и . J. Medical Imaging Health Informatics, 10 (5): 1249-1256 (2020)