%0 Conference Paper %1 conf/ieeesensors/VatanparvarHS21 %A Vatanparvar, Daryosh %A Hii, Doreen %A Shkel, Andrei M. %B IEEE SENSORS %D 2021 %I IEEE %K dblp %P 1-4 %T Fabrication Process and Structural Characterization of Fused Silica-on-Silicon Toroidal Ring Gyroscope. %U http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2021.html#VatanparvarHS21 %@ 978-1-7281-9501-8

@inproceedings{conf/ieeesensors/VatanparvarHS21, added-at = {2023-09-08T00:00:00.000+0200}, author = {Vatanparvar, Daryosh and Hii, Doreen and Shkel, Andrei M.}, biburl = {https://www.bibsonomy.org/bibtex/2caa04ec3b2c595358e4e89c33ed2cba7/dblp}, booktitle = {IEEE SENSORS}, crossref = {conf/ieeesensors/2021}, ee = {https://doi.org/10.1109/SENSORS47087.2021.9639662}, interhash = {0275f4ba745ee6054e6aec0abfcbc73d}, intrahash = {caa04ec3b2c595358e4e89c33ed2cba7}, isbn = {978-1-7281-9501-8}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-09T12:38:32.000+0200}, title = {Fabrication Process and Structural Characterization of Fused Silica-on-Silicon Toroidal Ring Gyroscope.}, url = {http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2021.html#VatanparvarHS21}, year = 2021 }