Article,
Review of advances in cubic boron nitride film synthesis
Materials Science and Engineering: R, 21 (2): 47--100 (1997)
DOI: doi:10.1016/S0927-796X(97)00009-0
Abstract
Cubic boron nitride (cBN) has a number of highly desirable mechanical,
thermal, electrical, and optical properties. Because of this, there
has been an extensive worldwide effort to synthesize thin films of
cBN. Film synthesis is difficult in that without significant levels
of ion bombardment during growth, only sp2-bonded BN forms, not sp3-bonded
cBN. Recently there has been considerable progress in improving the
deposition techniques and cBN film quality. In addition, progress
has been made in understanding how energetic deposition conditions
can lead to cBN formation. However, unanswered questions remain and
process improvements are still needed. In this paper we critically
and comprehensively review recent developments in cBN film synthesis
and characterization. First, the structures and stability of the
BN phases and characterization techniques are described. Next, the
key experimental parameters controlling cBN film formation and synthesis
techniques are discussed. Following a review of microstructure, the
proposed mechanisms of cBN formation and the observed mechanical
and electrical properties of cBN films are analyzed. We conclude
by highlighting the current impediments to the practical realization
of cBN-film technology.
