%0 Journal Article %1 journals/mr/SleeckxSSKDJBA05 %A Sleeckx, E. %A Schaekers, Marc %A Shi, X. %A Kunnen, E. %A Degroote, B. %A Jurczak, M. %A de Potter de ten Broeck, Muriel %A Augendre, E. %D 2005 %J Microelectron. Reliab. %K dblp %N 5-6 %P 865-868 %T Optimization of low temperature silicon nitride processes for improvement of device performance. %U http://dblp.uni-trier.de/db/journals/mr/mr45.html#SleeckxSSKDJBA05 %V 45

@article{journals/mr/SleeckxSSKDJBA05, added-at = {2024-03-13T00:00:00.000+0100}, author = {Sleeckx, E. and Schaekers, Marc and Shi, X. and Kunnen, E. and Degroote, B. and Jurczak, M. and de Potter de ten Broeck, Muriel and Augendre, E.}, biburl = {https://www.bibsonomy.org/bibtex/215f018fe02d93eef2150bd8cef6a9088/dblp}, ee = {https://doi.org/10.1016/j.microrel.2004.10.028}, interhash = {079a58863aa856c94a03dfa8c223e767}, intrahash = {15f018fe02d93eef2150bd8cef6a9088}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {5-6}, pages = {865-868}, timestamp = {2024-04-09T02:50:44.000+0200}, title = {Optimization of low temperature silicon nitride processes for improvement of device performance.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr45.html#SleeckxSSKDJBA05}, volume = 45, year = 2005 }