%0 Journal Article %1 journals/mr/PersanoTFMSQ12 %A Persano, Anna %A Tazzoli, Augusto %A Farinelli, Paola %A Meneghesso, Gaudenzio %A Siciliano, Pietro %A Quaranta, Fabio %D 2012 %J Microelectron. Reliab. %K dblp %N 9-10 %P 2245-2249 %T K-band capacitive MEMS switches on GaAs substrate: Design, fabrication, and reliability. %U http://dblp.uni-trier.de/db/journals/mr/mr52.html#PersanoTFMSQ12 %V 52

@article{journals/mr/PersanoTFMSQ12, added-at = {2022-02-04T00:00:00.000+0100}, author = {Persano, Anna and Tazzoli, Augusto and Farinelli, Paola and Meneghesso, Gaudenzio and Siciliano, Pietro and Quaranta, Fabio}, biburl = {https://www.bibsonomy.org/bibtex/2974e1ed3d8c335e34e0bb8943e38cf0e/dblp}, ee = {https://doi.org/10.1016/j.microrel.2012.06.008}, interhash = {0d706e61ad176a1ed8dbca6d91992ceb}, intrahash = {974e1ed3d8c335e34e0bb8943e38cf0e}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-10}, pages = {2245-2249}, timestamp = {2024-04-09T02:48:37.000+0200}, title = {K-band capacitive MEMS switches on GaAs substrate: Design, fabrication, and reliability.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr52.html#PersanoTFMSQ12}, volume = 52, year = 2012 }