Abstract
The manufacture of integrated circuits is driven by a
demand for faster calculation capabilities and lower
costs, which will require the development of a new
generation of manufacturing tools to increase yield
productivity, spearheaded by improved measurement
devices and advanced process control. The objectives of
this paper are to review of the challenges in applying
two areas of expertise in process systems engineering
(PSE), namely process monitoring and control, and to
motivate more academics working in PSE to get actively
involved. PSE solutions appropriate for these
challenges involve harnessing multivariate statistics,
automated modelling approaches like genetic
programming, and multivariable model-based control. The
paper is illustrated with several example applications,
all tested in fabrication facilities in Israel.
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