%0 Conference Paper %1 conf/nems/LiuXCNL10 %A Liu, Yi %A Xue, Chenyang %A Chou, Xiujian %A Niu, Kangkang %A Liu, Jun %B NEMS %D 2010 %I IEEE %K dblp %P 1029-1032 %T Internal profile reconstruction for MEMS microstructures based on infrared transmission technology. %U http://dblp.uni-trier.de/db/conf/nems/nems2010.html#LiuXCNL10 %@ 978-1-4244-6543-9

@inproceedings{conf/nems/LiuXCNL10, added-at = {2017-05-17T00:00:00.000+0200}, author = {Liu, Yi and Xue, Chenyang and Chou, Xiujian and Niu, Kangkang and Liu, Jun}, biburl = {https://www.bibsonomy.org/bibtex/24fae1487eff684bec22ed37561edc396/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2010}, ee = {https://doi.org/10.1109/NEMS.2010.5592581}, interhash = {0031eeed2b85ca65b01aeefdef7a2cf5}, intrahash = {4fae1487eff684bec22ed37561edc396}, isbn = {978-1-4244-6543-9}, keywords = {dblp}, pages = {1029-1032}, publisher = {IEEE}, timestamp = {2019-10-17T22:14:14.000+0200}, title = {Internal profile reconstruction for MEMS microstructures based on infrared transmission technology.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2010.html#LiuXCNL10}, year = 2010 }