%0 Journal Article %1 journals/tcad/TianWB01 %A Tian, Ruiqi %A Wong, Martin D. F. %A Boone, Robert %D 2001 %J IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. %K dblp %N 7 %P 902-910 %T Model-based dummy feature placement for oxide chemical-mechanicalpolishing manufacturability. %U http://dblp.uni-trier.de/db/journals/tcad/tcad20.html#TianWB01 %V 20

@article{journals/tcad/TianWB01, added-at = {2022-10-02T00:00:00.000+0200}, author = {Tian, Ruiqi and Wong, Martin D. F. and Boone, Robert}, biburl = {https://www.bibsonomy.org/bibtex/2e5404c291f0e835e536551dbfb739e34/dblp}, ee = {https://doi.org/10.1109/43.931037}, interhash = {03eb84d87c44b1794a4b375545fe29b6}, intrahash = {e5404c291f0e835e536551dbfb739e34}, journal = {IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.}, keywords = {dblp}, number = 7, pages = {902-910}, timestamp = {2024-04-08T19:46:55.000+0200}, title = {Model-based dummy feature placement for oxide chemical-mechanicalpolishing manufacturability.}, url = {http://dblp.uni-trier.de/db/journals/tcad/tcad20.html#TianWB01}, volume = 20, year = 2001 }