%0 Conference Paper %1 conf/smc/Wang0HQWZ23 %A Wang, GengHong %A Zhu, Qinghua %A Hou, Yan %A Qiao, Yan %A Wu, NaiQi %A Zhou, MengChu %B SMC %D 2023 %I IEEE %K dblp %P 3379-3384 %T Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing Hybrid-Type Wafers. %U http://dblp.uni-trier.de/db/conf/smc/smc2023.html#Wang0HQWZ23 %@ 979-8-3503-3702-0

@inproceedings{conf/smc/Wang0HQWZ23, added-at = {2024-02-13T00:00:00.000+0100}, author = {Wang, GengHong and Zhu, Qinghua and Hou, Yan and Qiao, Yan and Wu, NaiQi and Zhou, MengChu}, biburl = {https://www.bibsonomy.org/bibtex/2023b943d7032c8c1b2c3b8615660ee4e/dblp}, booktitle = {SMC}, crossref = {conf/smc/2023}, ee = {https://doi.org/10.1109/SMC53992.2023.10394546}, interhash = {0f2d3f5bb8f8cf61d29380bc0c63199d}, intrahash = {023b943d7032c8c1b2c3b8615660ee4e}, isbn = {979-8-3503-3702-0}, keywords = {dblp}, pages = {3379-3384}, publisher = {IEEE}, timestamp = {2024-04-09T19:24:58.000+0200}, title = {Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing Hybrid-Type Wafers.}, url = {http://dblp.uni-trier.de/db/conf/smc/smc2023.html#Wang0HQWZ23}, year = 2023 }