%0 Journal Article %1 journals/mr/FilipovicSRCS15 %A Filipovic, Lado %A Singulani, Anderson Pires %A Roger, Frederic %A Carniello, Sara %A Selberherr, Siegfried %D 2015 %J Microelectron. Reliab. %K dblp %N 9-10 %P 1843-1848 %T Intrinsic stress analysis of tungsten-lined open TSVs. %U http://dblp.uni-trier.de/db/journals/mr/mr55.html#FilipovicSRCS15 %V 55

@article{journals/mr/FilipovicSRCS15, added-at = {2023-09-30T00:00:00.000+0200}, author = {Filipovic, Lado and Singulani, Anderson Pires and Roger, Frederic and Carniello, Sara and Selberherr, Siegfried}, biburl = {https://www.bibsonomy.org/bibtex/242456356414ce3116ce07bcdf2acf348/dblp}, ee = {https://www.wikidata.org/entity/Q62599833}, interhash = {17a76dbc9571d8a276147d52ede15571}, intrahash = {42456356414ce3116ce07bcdf2acf348}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-10}, pages = {1843-1848}, timestamp = {2024-04-09T02:49:13.000+0200}, title = {Intrinsic stress analysis of tungsten-lined open TSVs.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr55.html#FilipovicSRCS15}, volume = 55, year = 2015 }