%0 Journal Article %1 journals/mj/SatkaLSVDKVM06 %A Satka, Alexander %A Liday, J. %A Srnánek, R. %A Vincze, A. %A Donoval, Daniel %A Kovác, Jaroslav %A Veselý, Marián %A Michalka, Miroslav %D 2006 %J Microelectron. J. %K dblp %N 11 %P 1389-1395 %T Characterisation of titanium disilicide thin films. %U http://dblp.uni-trier.de/db/journals/mj/mj37.html#SatkaLSVDKVM06 %V 37

@article{journals/mj/SatkaLSVDKVM06, added-at = {2022-10-04T00:00:00.000+0200}, author = {Satka, Alexander and Liday, J. and Srnánek, R. and Vincze, A. and Donoval, Daniel and Kovác, Jaroslav and Veselý, Marián and Michalka, Miroslav}, biburl = {https://www.bibsonomy.org/bibtex/235d091bee378d0ffd6dfd371a0581234/dblp}, ee = {https://doi.org/10.1016/j.mejo.2006.06.004}, interhash = {122cabea5d3aea46e9c9def44832046a}, intrahash = {35d091bee378d0ffd6dfd371a0581234}, journal = {Microelectron. J.}, keywords = {dblp}, number = 11, pages = {1389-1395}, timestamp = {2024-04-08T21:36:51.000+0200}, title = {Characterisation of titanium disilicide thin films.}, url = {http://dblp.uni-trier.de/db/journals/mj/mj37.html#SatkaLSVDKVM06}, volume = 37, year = 2006 }