%0 Thesis %1 kuhne1990insitudotierung %A Kühne, Heinz %D 1990 %K %T In-situ-Dotierung und Autodoping im CVD-Siliciumepitaxieprozess

@phdthesis{kuhne1990insitudotierung, added-at = {2023-12-12T18:26:01.000+0100}, author = {Kühne, Heinz}, biburl = {https://www.bibsonomy.org/bibtex/2d6c164268c0284d535fef848fe463cfa/admin}, dnbtitleid = {911361324}, interhash = {123d44ccaabce2f0858694bc2aef2aee}, intrahash = {d6c164268c0284d535fef848fe463cfa}, keywords = {}, school = {Akad. d. Wiss. Berlin}, timestamp = {2023-12-12T18:26:01.000+0100}, title = {In-situ-Dotierung und Autodoping im CVD-Siliciumepitaxieprozess}, type = {habilitation}, year = 1990 }