%0 Journal Article %1 journals/mr/WangCDL08 %A Wang, Ying %A Cao, Fei %A Ding, Minghui %A Liu, Yun-Tao %D 2008 %J Microelectron. Reliab. %K dblp %N 11-12 %P 1800-1803 %T Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact system. %U http://dblp.uni-trier.de/db/journals/mr/mr48.html#WangCDL08 %V 48

@article{journals/mr/WangCDL08, added-at = {2021-01-21T00:00:00.000+0100}, author = {Wang, Ying and Cao, Fei and Ding, Minghui and Liu, Yun-Tao}, biburl = {https://www.bibsonomy.org/bibtex/2905bf4e519c2e9f70c47951efaadbb9b/dblp}, ee = {https://doi.org/10.1016/j.microrel.2008.08.003}, interhash = {2a9d818d0b6d226ef352a95c631062e3}, intrahash = {905bf4e519c2e9f70c47951efaadbb9b}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {11-12}, pages = {1800-1803}, timestamp = {2024-04-09T02:48:37.000+0200}, title = {Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact system.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr48.html#WangCDL08}, volume = 48, year = 2008 }