%0 Conference Paper %1 conf/nems/ArcamoneSVUABBBP09 %A Arcamone, Julien %A Sansa, Marc %A Verd, Jaume %A Uranga, Arantxa %A Abadal, Gabriel %A Barniol, Núria %A van den Boogaart, Marc A. F. %A Brugger, Juergen %A Pérez-Murano, Francesc %B NEMS %D 2009 %I IEEE Computer Society %K dblp %P 94-97 %T Nanomechanical mass sensor for monitoring deposition rates through confined apertures. %U http://dblp.uni-trier.de/db/conf/nems/nems2009.html#ArcamoneSVUABBBP09 %@ 978-1-4244-4629-2

@inproceedings{conf/nems/ArcamoneSVUABBBP09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Arcamone, Julien and Sansa, Marc and Verd, Jaume and Uranga, Arantxa and Abadal, Gabriel and Barniol, Núria and van den Boogaart, Marc A. F. and Brugger, Juergen and Pérez-Murano, Francesc}, biburl = {https://www.bibsonomy.org/bibtex/2b06e37bc214c60524aebaf2e2238213e/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2009}, ee = {https://www.wikidata.org/entity/Q61825317}, interhash = {2d1975283df29d62422c3ca2a8d918db}, intrahash = {b06e37bc214c60524aebaf2e2238213e}, isbn = {978-1-4244-4629-2}, keywords = {dblp}, pages = {94-97}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:56:10.000+0200}, title = {Nanomechanical mass sensor for monitoring deposition rates through confined apertures.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2009.html#ArcamoneSVUABBBP09}, year = 2009 }