%0 Conference Paper %1 conf/nems/KimYA17 %A Kim, Jungkwun J. K. %A Yoon, Yong-Kyu %A Allen, Mark G. %B NEMS %D 2017 %I IEEE %K dblp %P 463-466 %T Double-side exposure UV-LED CNC lithography for fine 3D microfabrication. %U http://dblp.uni-trier.de/db/conf/nems/nems2017.html#KimYA17 %@ 978-1-5090-3059-0

@inproceedings{conf/nems/KimYA17, added-at = {2021-09-11T00:00:00.000+0200}, author = {Kim, Jungkwun J. K. and Yoon, Yong-Kyu and Allen, Mark G.}, biburl = {https://www.bibsonomy.org/bibtex/2b05fb1e89be4bf25ef1f1136933dfd70/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2017}, ee = {https://doi.org/10.1109/NEMS.2017.8017065}, interhash = {13980f220157fe524971eec1339d2c51}, intrahash = {b05fb1e89be4bf25ef1f1136933dfd70}, isbn = {978-1-5090-3059-0}, keywords = {dblp}, pages = {463-466}, publisher = {IEEE}, timestamp = {2024-04-10T19:55:52.000+0200}, title = {Double-side exposure UV-LED CNC lithography for fine 3D microfabrication.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2017.html#KimYA17}, year = 2017 }