%0 Journal Article %1 journals/ijcat/ZhangWMSZG07 %A Zhang, Y. C. %A Wu, Y. F. %A Ma, S. G. %A Sun, S. N. %A Zhou, Y. %A Geng, M. %D 2007 %J Int. J. Comput. Appl. Technol. %K dblp %N 2/3/4 %P 173-177 %T Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique. %U http://dblp.uni-trier.de/db/journals/ijcat/ijcat29.html#ZhangWMSZG07 %V 29

@article{journals/ijcat/ZhangWMSZG07, added-at = {2020-09-17T00:00:00.000+0200}, author = {Zhang, Y. C. and Wu, Y. F. and Ma, S. G. and Sun, S. N. and Zhou, Y. and Geng, M.}, biburl = {https://www.bibsonomy.org/bibtex/2e59e5e2e2f9d07676751332fa95fe5ac/dblp}, ee = {https://doi.org/10.1504/IJCAT.2007.015257}, interhash = {3f9b664f32ce60a9da74324590cb1431}, intrahash = {e59e5e2e2f9d07676751332fa95fe5ac}, journal = {Int. J. Comput. Appl. Technol.}, keywords = {dblp}, number = {2/3/4}, pages = {173-177}, timestamp = {2020-09-18T11:51:40.000+0200}, title = {Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique.}, url = {http://dblp.uni-trier.de/db/journals/ijcat/ijcat29.html#ZhangWMSZG07}, volume = 29, year = 2007 }