%0 Conference Paper %1 conf/nems/ChenJLZYYY21 %A Chen, Zeji %A Jia, Qianqian %A Liu, Wenli %A Zhu, Yinfang %A Yuan, Quan %A Yang, Jinling %A Yang, Fuhua %B NEMS %D 2021 %I IEEE %K dblp %P 455-458 %T A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages. %U http://dblp.uni-trier.de/db/conf/nems/nems2021.html#ChenJLZYYY21 %@ 978-1-6654-1941-3

@inproceedings{conf/nems/ChenJLZYYY21, added-at = {2021-06-28T00:00:00.000+0200}, author = {Chen, Zeji and Jia, Qianqian and Liu, Wenli and Zhu, Yinfang and Yuan, Quan and Yang, Jinling and Yang, Fuhua}, biburl = {https://www.bibsonomy.org/bibtex/20de86ca65bf3cb32395383fbfe10fa17/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2021}, ee = {https://doi.org/10.1109/NEMS51815.2021.9451294}, interhash = {416c104f16c54c796d5024eb1d4817e5}, intrahash = {0de86ca65bf3cb32395383fbfe10fa17}, isbn = {978-1-6654-1941-3}, keywords = {dblp}, pages = {455-458}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:24.000+0200}, title = {A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2021.html#ChenJLZYYY21}, year = 2021 }