%0 Conference Paper %1 conf/nems/ZhaoWWZYWMLY13 %A Zhao, Le %A Wang, Zuobin %A Wang, Dapeng %A Zhang, Ziang %A Yu, Y. %A Weng, Zhankun %A Maple, Carsten %A Li, Dayou %A Yue, Yong %B NEMS %D 2013 %I IEEE %K dblp %P 1236-1239 %T Silicon wafer modification by laser interference. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ZhaoWWZYWMLY13

@inproceedings{conf/nems/ZhaoWWZYWMLY13, added-at = {2023-09-30T00:00:00.000+0200}, author = {Zhao, Le and Wang, Zuobin and Wang, Dapeng and Zhang, Ziang and Yu, Y. and Weng, Zhankun and Maple, Carsten and Li, Dayou and Yue, Yong}, biburl = {https://www.bibsonomy.org/bibtex/2a58247fac01c96c72950a1ca27911156/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559942}, interhash = {4d2dc1e8a45e422173471ddd9ddeee6b}, intrahash = {a58247fac01c96c72950a1ca27911156}, keywords = {dblp}, pages = {1236-1239}, publisher = {IEEE}, timestamp = {2024-04-10T19:55:39.000+0200}, title = {Silicon wafer modification by laser interference.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ZhaoWWZYWMLY13}, year = 2013 }