%0 Thesis %1 schierling1998untersuchungen %A Schierling, Matthias %D 1998 %K %T Untersuchungen zur Kinetik der CVD-Abscheidung von Al_1tn2O_1tn3 aus AlCl_1tn3-CO_1tn2-HCl-Gemischen

@phdthesis{schierling1998untersuchungen, added-at = {2023-12-12T22:48:13.000+0100}, author = {Schierling, Matthias}, biburl = {https://www.bibsonomy.org/bibtex/2243bc705c0c3abda7242e7fe52ffe3b4/admin}, dnbtitleid = {956161979}, interhash = {4e6f60aef450f5e7967d970ba8430a7d}, intrahash = {243bc705c0c3abda7242e7fe52ffe3b4}, keywords = {}, school = {TU Aachen}, timestamp = {2023-12-12T22:48:13.000+0100}, title = {Untersuchungen zur Kinetik der CVD-Abscheidung von Al_1tn2O_1tn3 aus AlCl_1tn3-CO_1tn2-HCl-Gemischen}, year = 1998 }