%0 Conference Paper %1 conf/nems/ChungCSC09 %A Chung, Chen-Kuei %A Chen, T. C. %A Shih, T. R. %A Chang, W. T. %B NEMS %D 2009 %I IEEE Computer Society %K dblp %P 885-888 %T Fabrication of a novel micro liquid flow sensor using a TaN thin film. %U http://dblp.uni-trier.de/db/conf/nems/nems2009.html#ChungCSC09 %@ 978-1-4244-4629-2

@inproceedings{conf/nems/ChungCSC09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Chung, Chen-Kuei and Chen, T. C. and Shih, T. R. and Chang, W. T.}, biburl = {https://www.bibsonomy.org/bibtex/2f3bcc231aa30fa158826fc09a5c485b6/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2009}, ee = {https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068716}, interhash = {4f5c895a66dfadf22599cdef9194a56a}, intrahash = {f3bcc231aa30fa158826fc09a5c485b6}, isbn = {978-1-4244-4629-2}, keywords = {dblp}, pages = {885-888}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:56:10.000+0200}, title = {Fabrication of a novel micro liquid flow sensor using a TaN thin film.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2009.html#ChungCSC09}, year = 2009 }