%0 Conference Paper %1 conf/ispd/WongYTO15 %A Wong, H.-S. Philip %A Yi, He %A Tung, Maryann C. %A Okabe, Kye %B ISPD %D 2015 %E Davoodi, Azadeh %E Young, Evangeline F. Y. %I ACM %K dblp %P 65-66 %T Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC Contact Hole/via Patterning. %U http://dblp.uni-trier.de/db/conf/ispd/ispd2015.html#WongYTO15 %@ 978-1-4503-3399-3

@inproceedings{conf/ispd/WongYTO15, added-at = {2018-11-06T00:00:00.000+0100}, author = {Wong, H.-S. Philip and Yi, He and Tung, Maryann C. and Okabe, Kye}, biburl = {https://www.bibsonomy.org/bibtex/28e79a505437c3668a4051974a6e295de/dblp}, booktitle = {ISPD}, crossref = {conf/ispd/2015}, editor = {Davoodi, Azadeh and Young, Evangeline F. Y.}, ee = {https://doi.org/10.1145/2717764.2723574}, interhash = {563df5141a5aa5a8e5f524a0e682be32}, intrahash = {8e79a505437c3668a4051974a6e295de}, isbn = {978-1-4503-3399-3}, keywords = {dblp}, pages = {65-66}, publisher = {ACM}, timestamp = {2018-11-07T14:00:20.000+0100}, title = {Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC Contact Hole/via Patterning.}, url = {http://dblp.uni-trier.de/db/conf/ispd/ispd2015.html#WongYTO15}, year = 2015 }