%0 Conference Paper %1 conf/wsc/KoitzschNNMMHKL11 %A Koitzsch, Matthias %A Noll, Humbert %A Nemecek, Alexander %A Merhof, Jochen %A Michl, Markus %A Honold, Alfred %A Kleineidam, Gerhard %A Lebrecht, Holger %B Winter Simulation Conference %D 2011 %E Jain, S. %E Jr., Roy R. Creasey %E Himmelspach, Jan %E White, K. Preston %E Fu, Michael C. %I IEEE %K %P 2022-2033 %T Implementing virtual metrology into semiconductor production processes: an investment assessment. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2011.html#KoitzschNNMMHKL11 %@ 978-1-4577-2107-6

@inproceedings{conf/wsc/KoitzschNNMMHKL11, added-at = {2023-12-12T18:40:39.000+0100}, author = {Koitzsch, Matthias and Noll, Humbert and Nemecek, Alexander and Merhof, Jochen and Michl, Markus and Honold, Alfred and Kleineidam, Gerhard and Lebrecht, Holger}, biburl = {https://www.bibsonomy.org/bibtex/2d4c79a54d58627c5a4e2f6524d0f2830/admin}, booktitle = {Winter Simulation Conference}, crossref = {conf/wsc/2011}, editor = {Jain, S. and Jr., Roy R. Creasey and Himmelspach, Jan and White, K. Preston and Fu, Michael C.}, ee = {http://dl.acm.org/citation.cfm?id=2431758}, interhash = {15b38767c0fc9c81524eef9068833a77}, intrahash = {d4c79a54d58627c5a4e2f6524d0f2830}, isbn = {978-1-4577-2107-6}, keywords = {}, pages = {2022-2033}, publisher = {IEEE}, timestamp = {2023-12-12T18:40:39.000+0100}, title = {Implementing virtual metrology into semiconductor production processes: an investment assessment.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2011.html#KoitzschNNMMHKL11}, year = 2011 }