%0 Conference Paper %1 conf/nems/ZhangDZF13 %A Zhang, Mengying %A Du, Lidong %A Zhao, Zhan %A Fang, Zhen %B NEMS %D 2013 %I IEEE %K dblp %P 665-668 %T Low-stress packaging for a MEMS atmosphere pressure sensor. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ZhangDZF13

@inproceedings{conf/nems/ZhangDZF13, added-at = {2024-02-05T00:00:00.000+0100}, author = {Zhang, Mengying and Du, Lidong and Zhao, Zhan and Fang, Zhen}, biburl = {https://www.bibsonomy.org/bibtex/25121dae25c929a5bd7ba5e21b2048d89/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559817}, interhash = {5cfdd8c1d31cdae9beab538d4c4cf3df}, intrahash = {5121dae25c929a5bd7ba5e21b2048d89}, keywords = {dblp}, pages = {665-668}, publisher = {IEEE}, timestamp = {2024-04-10T19:55:39.000+0200}, title = {Low-stress packaging for a MEMS atmosphere pressure sensor.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ZhangDZF13}, year = 2013 }