%0 Conference Paper %1 conf/icnn/ErtenGSGA96 %A Erten, Gamze %A Gharbi, Ammar B. A. %A Salam, Fathi M. A. %A Grotjohn, Timothy A. %A Asmussen, Jes %B ICNN %D 1996 %I IEEE %K dblp %P 1091-1096 %T Using neural networks to control the process of plasma etching and deposition. %U http://dblp.uni-trier.de/db/conf/icnn/icnn1996.html#ErtenGSGA96

@inproceedings{conf/icnn/ErtenGSGA96, added-at = {2019-08-23T00:00:00.000+0200}, author = {Erten, Gamze and Gharbi, Ammar B. A. and Salam, Fathi M. A. and Grotjohn, Timothy A. and Asmussen, Jes}, biburl = {https://www.bibsonomy.org/bibtex/2e4ec68c990415625defa303b9ff9e888/dblp}, booktitle = {ICNN}, crossref = {conf/icnn/1996}, ee = {https://doi.org/10.1109/ICNN.1996.549050}, interhash = {64ffe3c80b52bfbcaa95f61f32a5e421}, intrahash = {e4ec68c990415625defa303b9ff9e888}, keywords = {dblp}, pages = {1091-1096}, publisher = {IEEE}, timestamp = {2019-08-24T11:39:01.000+0200}, title = {Using neural networks to control the process of plasma etching and deposition.}, url = {http://dblp.uni-trier.de/db/conf/icnn/icnn1996.html#ErtenGSGA96}, year = 1996 }