%0 Conference Paper %1 conf/ewme/MitaLH18 %A Mita, Yoshio %A Lebrasseur, Eric %A Higo, Akio %B EWME %D 2018 %I IEEE %K dblp %P 101-105 %T In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration. %U http://dblp.uni-trier.de/db/conf/ewme/ewme2018.html#MitaLH18 %@ 978-1-5386-9114-4

@inproceedings{conf/ewme/MitaLH18, added-at = {2019-02-09T00:00:00.000+0100}, author = {Mita, Yoshio and Lebrasseur, Eric and Higo, Akio}, biburl = {https://www.bibsonomy.org/bibtex/22be060af511874b42ac6489f38ba7d50/dblp}, booktitle = {EWME}, crossref = {conf/ewme/2018}, ee = {https://doi.org/10.1109/EWME.2018.8629393}, interhash = {714d42fa808377faf0c221ee2be04717}, intrahash = {2be060af511874b42ac6489f38ba7d50}, isbn = {978-1-5386-9114-4}, keywords = {dblp}, pages = {101-105}, publisher = {IEEE}, timestamp = {2019-02-12T11:45:00.000+0100}, title = {In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration.}, url = {http://dblp.uni-trier.de/db/conf/ewme/ewme2018.html#MitaLH18}, year = 2018 }