%0 Journal Article %1 journals/tsmc/XiongLQBHW23 %A Xiong, WenQing %A Li, Jie %A Qiao, Yan %A Bai, Liping %A Huang, Baoying %A Wu, NaiQi %D 2023 %J IEEE Trans. Syst. Man Cybern. Syst. %K dblp %N 6 %P 3270-3283 %T An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules. %U http://dblp.uni-trier.de/db/journals/tsmc/tsmc53.html#XiongLQBHW23 %V 53

@article{journals/tsmc/XiongLQBHW23, added-at = {2023-06-15T00:00:00.000+0200}, author = {Xiong, WenQing and Li, Jie and Qiao, Yan and Bai, Liping and Huang, Baoying and Wu, NaiQi}, biburl = {https://www.bibsonomy.org/bibtex/2a758a53bcab8c4f60cf7c3ff88fece91/dblp}, ee = {https://doi.org/10.1109/TSMC.2022.3222915}, interhash = {7ad0c00012699f05890af59b53899927}, intrahash = {a758a53bcab8c4f60cf7c3ff88fece91}, journal = {IEEE Trans. Syst. Man Cybern. Syst.}, keywords = {dblp}, month = {June}, number = 6, pages = {3270-3283}, timestamp = {2024-04-08T19:19:40.000+0200}, title = {An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules.}, url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmc53.html#XiongLQBHW23}, volume = 53, year = 2023 }