%0 Journal Article %1 journals/mr/WangCWW13 %A Wang, B. %A Coster, Jeroen De %A Wevers, Martine %A Wolf, Ingrid De %D 2013 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1663-1666 %T A novel method to measure the internal pressure of MEMS thin-film packages. %U http://dblp.uni-trier.de/db/journals/mr/mr53.html#WangCWW13 %V 53

@article{journals/mr/WangCWW13, added-at = {2020-10-26T00:00:00.000+0100}, author = {Wang, B. and Coster, Jeroen De and Wevers, Martine and Wolf, Ingrid De}, biburl = {https://www.bibsonomy.org/bibtex/284363de0bd9982a95bd12d2ce0b1e65f/dblp}, ee = {https://doi.org/10.1016/j.microrel.2013.07.098}, interhash = {806f5e43ba826f6266e2d5ea34bf536f}, intrahash = {84363de0bd9982a95bd12d2ce0b1e65f}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1663-1666}, timestamp = {2020-10-27T12:44:39.000+0100}, title = {A novel method to measure the internal pressure of MEMS thin-film packages.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr53.html#WangCWW13}, volume = 53, year = 2013 }