%0 Journal Article %1 journals/scjapan/KamijoNS96 %A Kamijo, Masayoshi %A Nakazawa, Masaru %A Shimizu, Yoshio %D 1996 %J Syst. Comput. Jpn. %K dblp %N 6 %P 82-91 %T Identification of complicated shape objects by fractal characteristic variables - categorizing dust particles on LSI wafer surface. %U http://dblp.uni-trier.de/db/journals/scjapan/scjapan27.html#KamijoNS96 %V 27

@article{journals/scjapan/KamijoNS96, added-at = {2023-09-13T00:00:00.000+0200}, author = {Kamijo, Masayoshi and Nakazawa, Masaru and Shimizu, Yoshio}, biburl = {https://www.bibsonomy.org/bibtex/2e25dd566e6161c54182c8710e1821cb3/dblp}, ee = {https://doi.org/10.1002/scj.4690270608}, interhash = {83445733cffd7697f0824c37ac0e9738}, intrahash = {e25dd566e6161c54182c8710e1821cb3}, journal = {Syst. Comput. Jpn.}, keywords = {dblp}, number = 6, pages = {82-91}, timestamp = {2024-04-09T07:26:04.000+0200}, title = {Identification of complicated shape objects by fractal characteristic variables - categorizing dust particles on LSI wafer surface.}, url = {http://dblp.uni-trier.de/db/journals/scjapan/scjapan27.html#KamijoNS96}, volume = 27, year = 1996 }