%0 Conference Paper %1 conf/wsc/KoehlerWBS99 %A Koehler, Eric J. %A Wulf, Timbur M. %A Bruska, Alvin C. %A Seppanen, Marvin S. %B WSC %D 1999 %E Farrington, Phillip A. %E Nembhard, Harriet Black %E Sturrock, David T. %E Evans, Gerald W. %I WSC %K dblp %P 714-719 %T Evaluation of cluster tool throughput for thin film head production. %U http://dblp.uni-trier.de/db/conf/wsc/wsc1999-1.html#KoehlerWBS99 %@ 0-7803-5780-9

@inproceedings{conf/wsc/KoehlerWBS99, added-at = {2023-03-24T00:00:00.000+0100}, author = {Koehler, Eric J. and Wulf, Timbur M. and Bruska, Alvin C. and Seppanen, Marvin S.}, biburl = {https://www.bibsonomy.org/bibtex/2ccd18ce2e11439fdccba354ac0efe9c3/dblp}, booktitle = {WSC}, crossref = {conf/wsc/1999-1}, editor = {Farrington, Phillip A. and Nembhard, Harriet Black and Sturrock, David T. and Evans, Gerald W.}, ee = {https://doi.org/10.1145/324138.324465}, interhash = {87678ae5982f88c64f23d175396abc53}, intrahash = {ccd18ce2e11439fdccba354ac0efe9c3}, isbn = {0-7803-5780-9}, keywords = {dblp}, pages = {714-719}, publisher = {WSC}, timestamp = {2024-04-09T16:40:43.000+0200}, title = {Evaluation of cluster tool throughput for thin film head production.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc1999-1.html#KoehlerWBS99}, year = 1999 }