%0 Conference Paper %1 conf/wsc/HerrmannCHMNRS00 %A Herrmann, Jeffrey W. %A Conaghan, Brian F. %A Henn-Lecordier, Laurent %A Mellacheruvu, Praveen %A Nguyen, Manh-Quan %A Rubloff, Gary W. %A Shi, Rock Z. %B WSC %D 2000 %E Fishwick, Paul A. %E Kang, Keebom %E Joines, Jeffrey A. %E Barton, Russell R. %I WSC %K dblp %P 1491-1498 %T Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2000.html#HerrmannCHMNRS00 %@ 0-7803-6582-8

@inproceedings{conf/wsc/HerrmannCHMNRS00, added-at = {2023-03-24T00:00:00.000+0100}, author = {Herrmann, Jeffrey W. and Conaghan, Brian F. and Henn-Lecordier, Laurent and Mellacheruvu, Praveen and Nguyen, Manh-Quan and Rubloff, Gary W. and Shi, Rock Z.}, biburl = {https://www.bibsonomy.org/bibtex/2a1ac34603a0bb72ce0876aa4f4ffc866/dblp}, booktitle = {WSC}, crossref = {conf/wsc/2000}, editor = {Fishwick, Paul A. and Kang, Keebom and Joines, Jeffrey A. and Barton, Russell R.}, ee = {http://dl.acm.org/citation.cfm?id=510596}, interhash = {880f5f2caa534748f51eeeb987e503ff}, intrahash = {a1ac34603a0bb72ce0876aa4f4ffc866}, isbn = {0-7803-6582-8}, keywords = {dblp}, pages = {1491-1498}, publisher = {WSC}, timestamp = {2024-04-09T16:45:43.000+0200}, title = {Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2000.html#HerrmannCHMNRS00}, year = 2000 }