%0 Journal Article %1 journals/mr/GagnardRB01 %A Gagnard, Xavier %A Rey-Tauriac, Yannick %A Bonnaud, Olivier %D 2001 %J Microelectron. Reliab. %K dblp %N 9-10 %P 1335-1340 %T Polysilicon oxide quality optimization at Wafer level of a Bipolar/CMOS/DMOS technology. %U http://dblp.uni-trier.de/db/journals/mr/mr41.html#GagnardRB01 %V 41

@article{journals/mr/GagnardRB01, added-at = {2020-02-22T00:00:00.000+0100}, author = {Gagnard, Xavier and Rey-Tauriac, Yannick and Bonnaud, Olivier}, biburl = {https://www.bibsonomy.org/bibtex/2cf30254153e16867b0b529af5b4427ef/dblp}, ee = {https://doi.org/10.1016/S0026-2714(01)00213-X}, interhash = {88d7424d4389ef0cba6bb80ec63fefd5}, intrahash = {cf30254153e16867b0b529af5b4427ef}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-10}, pages = {1335-1340}, timestamp = {2020-02-25T13:22:12.000+0100}, title = {Polysilicon oxide quality optimization at Wafer level of a Bipolar/CMOS/DMOS technology.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr41.html#GagnardRB01}, volume = 41, year = 2001 }